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    Performance of micromachined quartz gravimetric sensors upon electrochemical adsorption of monolayers

    Access Status
    Fulltext not available
    Authors
    Kao, P.
    Patwardhan, A.
    Allara, D.
    Tadigadapa, S.
    Strutwolf, J.
    Arrigan, Damien
    Date
    2008
    Type
    Conference Paper
    
    Metadata
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    Citation
    Kao, P. and Patwardhan, A. and Allara, D. and Tadigadapa, S. and Strutwolf, J. and Arrigan, D. 2008. Performance of micromachined quartz gravimetric sensors upon electrochemical adsorption of monolayers, pp. 1544-1547.
    Source Title
    Proceedings of IEEE Sensors
    DOI
    10.1109/ICSENS.2008.4716742
    ISBN
    9781424425808
    School
    Nanochemistry Research Institute
    URI
    http://hdl.handle.net/20.500.11937/11883
    Collection
    • Curtin Research Publications
    Abstract

    This paper presents the results of electrochemical calibration experiments performed on micromachined quartz gravimetric sensors. The absolute mass sensitivity of bulk acoustic quartz crystal microbalance (QCM) can be improved into the sub-10-12 g range upon miniaturization of the resonator thickness and area. Using plasma etching, we have fabricated miniaturized QCMs with thicknesses of ~29 µ^m and diameters of 500 µ^m with f0=58 MHz. Resonators with 60 nm thick Ti/Pt top electrodes were used to study the electrochemically induced oxide layer formation on the metal surface, the adsorption of hydrogen, and underpotential deposition (UPD) of Cu on Pt electrodes. The performance of microQCM is compared with the performance of a frequency matched overtone mode of a commercial 5 MHz resonator. Micromachined QCMs showed expected sensitivity improvement to UPD of Cu, however an unexpected hundred fold enhancement to oxygen and ~28 times enhancement in the sensitivity to hydrogen adsorption was observed which may be due to the roughness/porosity of the electrodes. © 2008 IEEE.

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