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    Oriented graphite layer formation in Ti/C and TiC/C multilayers deposited by high current pulsed cathodic arc

    Access Status
    Fulltext not available
    Authors
    Persson, P.
    Ryves, L.
    Tucker, Mark
    McKenzie, D.
    Bilek, M.
    Date
    2008
    Type
    Journal Article
    
    Metadata
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    Citation
    Persson, P. and Ryves, L. and Tucker, M. and McKenzie, D. and Bilek, M. 2008. Oriented graphite layer formation in Ti/C and TiC/C multilayers deposited by high current pulsed cathodic arc. Journal of Applied Physics. 104.
    Source Title
    Journal of Applied Physics
    DOI
    10.1063/1.2959835
    ISSN
    0021-8979
    URI
    http://hdl.handle.net/20.500.11937/12519
    Collection
    • Curtin Research Publications
    Abstract

    Ti/C and TiC/C multilayers with periods ranging from 2 to 18 nm were grown by filtered highcurrent pulsed cathodic arc. The growth was monitored in situ by ellipsometry and cantilever stressmeasurements. The ellipsometry results reveal that the optical properties of the carbon vary as afunction of thickness. Correspondingly, the stress in each carbon layer as measured in situ exhibitstwo well defined values: initially the stress is low and then takes on a higher value for the remainderof the layer. Transmission electron microscopy shows that the initial growth of carbon on Ti or TiClayer is oriented with graphitic basal planes aligned parallel to the interface. After 2–4 nm of growth,the graphitic structure transforms to amorphous carbon. Electron energy loss spectroscopy showsthat the carbon layer simultaneously undergoes a transition from sp2 rich to sp3 rich material.

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