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    Synthesis of highly tetrahedral amorphous carbon by mixed-mode HiPIMS sputtering

    235757_235757.pdf (1.947Mb)
    Access Status
    Open access
    Authors
    Ganesan, R.
    McCulloch, D.
    Marks, Nigel
    Tucker, M.
    Partridge, J.
    Bilek, M.
    McKenzie, D.
    Date
    2015
    Type
    Journal Article
    
    Metadata
    Show full item record
    Citation
    Ganesan, R. and McCulloch, D. and Marks, N. and Tucker, M. and Partridge, J. and Bilek, M. and McKenzie, D. 2015. Synthesis of highly tetrahedral amorphous carbon by mixed-mode HiPIMS sputtering. Journal of Physics D: Applied Physics. 48 (44): Article ID 2001.
    Source Title
    Journal of Physics D: Applied Physics
    DOI
    10.1088/0022-3727/48/44/442001
    ISSN
    0022-3727
    School
    Department of Physics and Astronomy
    Remarks

    This is an author-created, un-copy edited version of an article accepted for publication in Journal of Physics D: Applied Physics. The publisher is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at http://doi.org/10.1088/0022-3727/48/44/442001

    URI
    http://hdl.handle.net/20.500.11937/18045
    Collection
    • Curtin Research Publications
    Abstract

    Tetrahedral amorphous carbon films with an sp 3 content of 80% have been produced by high power impulse magnetron sputtering (HiPIMS) operating in a mixed sputtering/arc mode. In this mode, short-lived cathode spots form in the magnetic racetrack and produce large numbers of carbon ions. The spots move rapidly, inhibiting the formation of macroparticles. An argon pressure below 2.5 mTorr was critical for obtaining films with high sp 3 content, high stress, large Tauc gap and symmetrical Raman spectra, and all four quantities were strongly correlated.

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