| dc.contributor.author | Woods, Andrew | |
| dc.contributor.author | Holliman, N. | |
| dc.contributor.author | Dodgson, N. | |
| dc.date.accessioned | 2017-01-30T12:36:27Z | |
| dc.date.available | 2017-01-30T12:36:27Z | |
| dc.date.created | 2016-01-03T20:00:13Z | |
| dc.date.issued | 2011 | |
| dc.identifier.citation | Woods, A. and Holliman, N. and Dodgson, N. 2011. Proceedings of SPIE Volume 7970, Alternative Lithographic Technologies III, 797001- The International Society for Optical Engineering: Introduction, pp. xiii-xx. San Jose, California: SPIE. | |
| dc.identifier.uri | http://hdl.handle.net/20.500.11937/23290 | |
| dc.identifier.doi | 10.1117/12.897034 | |
| dc.title | Proceedings of SPIE - The International Society for Optical Engineering: Introduction | |
| dc.type | Conference Paper | |
| dcterms.source.volume | 7863 | |
| dcterms.source.startPage | xiii | |
| dcterms.source.endPage | xx | |
| dcterms.source.title | Proceedings of SPIE - The International Society for Optical Engineering | |
| dcterms.source.series | Proceedings of SPIE - The International Society for Optical Engineering | |
| dcterms.source.isbn | 9780819484000 | |
| curtin.department | Humanities Research and Graduate Studies | |
| curtin.accessStatus | Open access via publisher | |
