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High-speed optical microscanner driven with resonation of Lam Waves using Pb(Zr.Ti)O3 thick films formed by aerosol deposition

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2005
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Journal Article

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Akedo, Jun and Lebedev, Maxim and Sato, Harumichi and Park, Jaehyuk. 2005. High-speed optical microscanner driven with resonation of Lam Waves using Pb(Zr.Ti)O3 thick films formed by aerosol deposition. Japanese Journal of Applied Physics. 44 (9B): pp. 7072-7077.
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Japanese Journal of Applied Physics
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Department of Exploration Geophysics
Faculty of Science and Engineering
WA School of Mines
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