Filtered pulsed cathodic arc deposition of fullerene-like carbon and carbon nitride films
MetadataShow full item record
Carbon and carbon nitride films (CN x , 0 ≤ x ≤ 0.26) were deposited by filtered pulsed cathodic arc and were investigated using transmission electron microscopy and X-ray photoelectron spectroscopy. A “fullerene-like” (FL) structure of ordered graphitic planes, similar to that of magnetron sputtered FL-CN x films, was observed in films deposited at 175 °C and above, with N2 pressures of 0 and 0.5 mTorr. Higher substrate temperatures and significant nitrogen incorporation are required to produce similar FL structure by sputtering, which may, at least in part, be explained by the high ion charge states and ion energies characteristic of arc deposition. A gradual transition from majority sp3-hybridized films to sp2 films was observed with increasing substrate temperature. High elastic recovery, an attractive characteristic mechanical property of FL-CN x films, is evident in arc-deposited films both with and without nitrogen content, and both with and without FL structure.
Copyright (2014) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.The following article appeared in Tucker, M. and Czigany, Z. and Broitman, E. and Naslund, L. and Hultman, L. and Rosen, J. 2014. Filtered pulsed cathodic arc deposition of fullerene-like carbon and carbon nitride films. Journal of Applied Physics. 115; and may be found at http://doi.org/10.1063/1.4871179
Showing items related by title, author, creator and subject.
Dwivedi, D.; Lepkova, Katerina; Becker, T. (2017)© 2017 The Author(s) Published by the Royal Society. All rights reserved. Carbon steel is a preferred construction material in many industrial and domestic applications, including oil and gas pipelines, where corrosion ...
Guenette, M.; Tucker, Mark; Ionescu, M.; Bilek, M.; McKenzie, D. (2011)Carbon diffusion is observed in single crystal a-Al2O3 substrates from carbon and Ti2AlC thin filmssynthesized via pulsed cathodic arc deposition. Diffusion was found to occur at substratetemperatures of 570 C and above. ...
Barfidokht, A.; Ciampi, S.; Luais, E.; Darwish, Nadim; Gooding, J. (2013)The phenomenon of nanoparticles attached to an electrode passivated by an organic layer allowing efficient electron transfer between redox species in solution and the underlying electrode to be restored has resulted in ...