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dc.contributor.authorTucker, Mark
dc.contributor.authorPutman, Kate
dc.contributor.authorGanesan, R.
dc.contributor.authorLattemann, M.
dc.contributor.authorStueber, M.
dc.contributor.authorUlrich, S.
dc.contributor.authorBilek, M.
dc.contributor.authorMcKenzie, D.
dc.contributor.authorMarks, Nigel
dc.date.accessioned2017-04-28T13:57:31Z
dc.date.available2017-04-28T13:57:31Z
dc.date.created2017-04-28T09:06:12Z
dc.date.issued2017
dc.identifier.citationTucker, M. and Putman, K. and Ganesan, R. and Lattemann, M. and Stueber, M. and Ulrich, S. and Bilek, M. et al. 2017. The behaviour of arcs in carbon mixed-mode high-power impulse magnetron sputtering. Journal of Physics D: Applied Physics. 50 (14).
dc.identifier.urihttp://hdl.handle.net/20.500.11937/52102
dc.identifier.doi10.1088/1361-6463/aa5bcf
dc.description.abstract

Mixed-mode deposition of carbon is an extension of high-power impulse magnetron sputtering in which a short-lived arc is deliberately allowed to ignite on the target surface to increase the ionised fraction of carbon in the deposition flux. Here we investigate the ignition and evolution of these arcs and examine their behaviour for different conditions of argon pressure, power supply voltage, and current. We find that mixed-mode deposition is sensitive to the condition of the target surface, and changing the operating parameters causes changes in the target surface condition which themselves affect the discharge in a process of negative feedback. Initially the arcs are evenly distributed on the target racetrack, but after a long period of operation the mode of erosion changes and arcs become localised in a small region, resulting in a pronounced nodular structure. We also quantify macroparticle generation and observe a power-law size distribution typical of arc discharges. Fewer particles are generated for operation at lower Ar pressure when the arc spot velocity is higher.

dc.publisherIOP Publishing Ltd
dc.titleThe behaviour of arcs in carbon mixed-mode high-power impulse magnetron sputtering
dc.typeJournal Article
dcterms.source.volume50
dcterms.source.number14
dcterms.source.issn0022-3727
dcterms.source.titleJournal of Physics D: Applied Physics
curtin.departmentDepartment of Physics and Astronomy
curtin.accessStatusFulltext not available


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