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    Novel Applications of FIB-SEM-Based ToF-SIMS in Atom Probe Tomography Workflows

    79445.pdf (281.2Kb)
    Access Status
    Open access
    Authors
    Rickard, William
    Reddy, Steven
    Saxey, David
    Fougerouse, Denis
    Timms, Nick
    Daly, L.
    Peterman, E.
    Cavosie, Aaron
    Jourdan, Fred
    Date
    2020
    Type
    Journal Article
    
    Metadata
    Show full item record
    Citation
    Rickard, W.D.A. and Reddy, S.M. and Saxey, D.W. and Fougerouse, D. and Timms, N.E. and Daly, L. and Peterman, E. et al. 2020. Novel Applications of FIB-SEM-Based ToF-SIMS in Atom Probe Tomography Workflows. Microscopy and Microanalysis. : pp. 1-8.
    Source Title
    Microscopy and Microanalysis
    DOI
    10.1017/S1431927620000136
    ISSN
    1431-9276
    Faculty
    Faculty of Science and Engineering
    School
    John de Laeter Centre (JdLC)
    School of Earth and Planetary Sciences (EPS)
    Funding and Sponsorship
    http://purl.org/au-research/grants/arc/DE190101307
    URI
    http://hdl.handle.net/20.500.11937/79363
    Collection
    • Curtin Research Publications
    Abstract

    Copyright © Microscopy Society of America 2020. Atom probe tomography (APT) is used to quantify atomic-scale elemental and isotopic compositional variations within a very small volume of material (typically <0.01 μm3). The small analytical volume ideally contains specific compositional or microstructural targets that can be placed within the context of the previously characterized surface in order to facilitate a correct interpretation of APT data. In this regard, careful targeting and preparation are paramount to ensure that the desired target, which is often smaller than 100 nm, is optimally located within the APT specimen. Needle-shaped specimens required for atom probe analysis are commonly prepared using a focused ion beam scanning electron microscope (FIB-SEM). Here, we utilize FIB-SEM-based time-of-flight secondary ion mass spectrometry (ToF-SIMS) to illustrate a novel approach to targeting <100 nm compositional and isotopic variations that can be used for targeting regions of interest for subsequent lift-out and APT analysis. We present a new method for high-spatial resolution targeting of small features that involves using FIB-SEM-based electron deposition of platinum "buttons" prior to standard lift-out and sharpening procedures for atom probe specimen manufacture. In combination, FIB-ToF-SIMS analysis and application of the "button" method ensure that even the smallest APT targets can be successfully captured in extracted needles.

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