Nonlinear Analysis of Electric Potential in a Piezoelectric Thin Plate as Pressure Sensor

Abstract

Piezoelectric materials are widely applied in electronic components due to their ability to couple electric and mechanical fields. For the piezoelectric thin plate as a pressure sensor, we extend the modified first-order piezoelectric plate theory to explore the nonlinear solution of electric potential and discuss the relevant regulation mechanisms. Based on the piezoelectric effect, the electric potential generated by deformation is not linear with thickness. A quadratic function of electric potential across thickness is introduced. However, the electric potential on upper and lower electrodes is an unknown constant, which can be determined by the nonlinear complementary equation based on the Gauss theorem. It is shown that the nonlinear results of electric potential are consistent with outcomes by the three-dimensional finite element method. Furthermore, relevant regulation mechanisms are discussed on electric potential, including supported conditions, plate thickness, and load area. In addition, the influence of load locations on the electric potential response is analyzed. It is expected that these findings will be instructive to the structural design of piezoelectric pressure sensors.