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dc.contributor.authorChua, Han
dc.contributor.editorChairman Hymap 2008 - Prof Kwang
dc.identifier.citationChua, Han. 2008. Review of Micromachining of Ceramics by Etching, in Chairman Hymap 2008 - Prof Kwang (ed), The 1st International Symposium on Hybrid Materials and Processing, Oct 27 2008. Busan Korea: National Core Research Center for Hybrid Materials Solutions Korea

In the last two decades, there has been an enormous surge in interest in ceramic materials and, as a result there have been significant advances in their development and applications. Their inherent properties, such as capability of operating at temperatures far above metals, high level of hardness and toughness, low coefficient of thermal expansion and high thermal conductivity rendered ceramics to be one of the leading engineering materials. Many research works have been conducted in the past few years on machining of advanced ceramics using different processing methods in order to obtain a better surface roughness, higher rate of removal and improved tool life. Micromachining using chemical etching is one of those methods that do not involve the problem of tool life and direct tool-workpiece contact. However, only a few research works have been done on micromachining of ceramics using chemical etching.Hence, study of chemical machining of advanced ceramics is still needed as the process has found wide application in the industry because of its relative low operating costs. In this paper, we summarize the recent progresses in machining of different types of advanced ceramics, material processing methods such as wet etching and dry etching, and finally the prospects for control of material removal rate and surface quality in the process of ceramic micromachining.

dc.publisherNational Core Research Center for Hybrid Materials Solutions Korea
dc.titleReview of Micromachining of Ceramics by Etching
dc.typeConference Paper
dcterms.source.titleThe Proceedings of Hymap 2008
dcterms.source.seriesThe Proceedings of Hymap 2008
dcterms.source.conferenceThe 1st International Symposium on Hybrid Materials and Processing
dcterms.source.conference-start-dateOct 27 2008
dcterms.source.conferencelocationBusan Korea
dcterms.source.placeSouth Korea
curtin.departmentCurtin Sarawak - Faculty Office
curtin.accessStatusFulltext not available

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