Atomic-scale observation and control of the reaction of phosphine with silicon
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Authors
Schofield, S.
Curson, N.
Simmons, M.
Warschkow, O.
Marks, Nigel
Wilson, H.
McKenzie, D.
Smith, P.
Radny, M.
Date
2006Type
Journal Article
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Schofield, S. and Curson, N. and Simmons, M. and Warschkow, O. and Marks, N. and Wilson, H. and McKenzie, D. et al. 2006. Atomic-scale observation and control of the reaction of phosphine with silicon. e-Journal of Surface Science and Nanotechnology. 4: pp. 609-613.
Source Title
e-Journal of Surface Science and Nanotechnology