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dc.contributor.authorKocan, M.
dc.contributor.authorUmana-Membreno, G.
dc.contributor.authorKilburn, M.
dc.contributor.authorFletcher, Ian
dc.contributor.authorRecht, F.
dc.contributor.authorMcCarthy, L.
dc.contributor.authorMishra, U.
dc.contributor.authorNener, B.
dc.contributor.authorParish, G.
dc.date.accessioned2017-01-30T12:44:37Z
dc.date.available2017-01-30T12:44:37Z
dc.date.created2015-03-03T20:16:24Z
dc.date.issued2008
dc.identifier.citationKocan, M. and Umana-Membreno, G. and Kilburn, M. and Fletcher, I. and Recht, F. and McCarthy, L. and Mishra, U. et al. 2008. Scanning Ion Probe Studies of Silicon Implantation Profiles in AlGaN/GaN HEMT Heterostructures. Journal of Electronic Materials. 37 (5): pp. 554-557.
dc.identifier.urihttp://hdl.handle.net/20.500.11937/24720
dc.identifier.doi10.1007/s11664-007-0336-9
dc.description.abstract

This paper reports results of scanning ion probe studies fo silicon implantation profiles in source and drain regions of AlGaN/GaN high-electron-mobility transistor (HEMT) heterostructures. It is shown that both the undoped channel length and the transition region between implanted and non-implanted regions become wider with increasing depth in the structure. These results may explain the previously reported existence of resistance associated with the transition region between implanted and non-implanted semiconductor regions in AlGaN/GaN HEMT heterostructures with non-alloyed Si-implanted source and drain ohmic contact regions.

dc.publisherSpringer
dc.subjectgallium
dc.subjectnanoSIMS
dc.subjectohmic contacts
dc.subjectHEMT
dc.subjectAlGaN/GaN
dc.subjectAlluminium
dc.subjection implantation
dc.subjectcontact resistance
dc.titleScanning Ion Probe Studies of Silicon Implantation Profiles in AlGaN/GaN HEMT Heterostructures
dc.typeJournal Article
dcterms.source.volume37
dcterms.source.number5
dcterms.source.startPage554
dcterms.source.endPage557
dcterms.source.issn0361-5235
dcterms.source.titleJournal of Electronic Materials
curtin.accessStatusFulltext not available


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