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dc.contributor.authorTing, Huey Tze
dc.contributor.authorEl-Hossein, Khaled
dc.contributor.authorChua, Han
dc.identifier.citationTing, Huey Tze and Abou El-Hossein, K.A. and Chua, Han Bing. 2010. Etch Rate and Dimensional Accuracy of Machinable Glass Ceramics in Chemical Etching. Advances in Science and Technology. 65: pp. 251-256.

Machinable glass ceramic (MGC) is well known in the micro-electromechanical system and semiconductor industry. Chemical etching is used in this experiment to study the performance of MGC. The etching rate of MGC and its accuracy by indentation method is studied. The categoric parameter applied here is the type of chemical etchant used: hydrochloric (HCl), hydrophosphoric (H3PO4) and hydrobromic (HBr) acids; and, numerical parameters are etching temperature and etching solution. The experimental investigation that was carried out is governed by design of experiment (DoE).

dc.publisherTrans Tech Publications
dc.subjectMachinable Glass Ceramic
dc.subjectDesign of Experiment
dc.subjectChemical Etching
dc.titleEtch Rate and Dimensional Accuracy of Machinable Glass Ceramics in Chemical Etching
dc.typeJournal Article
dcterms.source.titleAdvances in Science and Technology

Copyright © 2010 Trans Tech Publications.

curtin.departmentCurtin Sarawak - Faculty Office
curtin.accessStatusOpen access

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