Characterisation of the growth of a carbonaceous film on silicon
dc.contributor.author | Beardmore, Joshua | |
dc.contributor.author | Palmer, A. | |
dc.contributor.author | Fabrie, C. | |
dc.contributor.author | Van Leeuwen, K. | |
dc.contributor.author | Sang, R. | |
dc.date.accessioned | 2018-04-30T02:40:29Z | |
dc.date.available | 2018-04-30T02:40:29Z | |
dc.date.created | 2018-04-16T07:41:35Z | |
dc.date.issued | 2012 | |
dc.identifier.citation | Beardmore, J. and Palmer, A. and Fabrie, C. and Van Leeuwen, K. and Sang, R. 2012. Characterisation of the growth of a carbonaceous film on silicon. Thin Solid Films. 520 (7): pp. 2414-2417. | |
dc.identifier.uri | http://hdl.handle.net/20.500.11937/66387 | |
dc.identifier.doi | 10.1016/j.tsf.2011.09.073 | |
dc.description.abstract |
In this paper we present the first characterisation of growth of a carbonaceous film on a silicon substrate exposed to a metastable atom beam using an in situ rotating polariser ellipsometer. The initial deposition of oil due to a background partial pressure in vacuum is investigated. Subsequent exposure of the deposited oil to a high flux metastable neon (Ne*) beam results in cross-linking of the oil film, creating a polymerised carbonaceous layer. Values for the mean residence time, polymerisation cross-section, and desorption cross-section are calculated and compared to similar studies performed for ion bombardment. Simple estimates can provide reasonable values for application of the theory to other systems. © 2011 Elsevier B.V. All rights reserved. | |
dc.publisher | Elsevier S.A. | |
dc.title | Characterisation of the growth of a carbonaceous film on silicon | |
dc.type | Journal Article | |
dcterms.source.volume | 520 | |
dcterms.source.number | 7 | |
dcterms.source.startPage | 2414 | |
dcterms.source.endPage | 2417 | |
dcterms.source.issn | 0040-6090 | |
dcterms.source.title | Thin Solid Films | |
curtin.department | School of Earth and Planetary Sciences (EPS) | |
curtin.accessStatus | Fulltext not available |
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