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    Omega-Phi compensated GID in side inclination mode for measurement of residual stress in polycrystalline thin films

    Access Status
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    Authors
    Wang, Xiaodong
    Van Riessen, Arie
    Date
    2017
    Type
    Journal Article
    
    Metadata
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    Citation
    Wang, X. and Van Riessen, A. 2017. Omega-Phi compensated GID in side inclination mode for measurement of residual stress in polycrystalline thin films. Powder Diffraction. 32 (S2): pp. S9-S15.
    Source Title
    Powder Diffraction
    DOI
    10.1017/S0885715617001117
    ISSN
    0885-7156
    School
    School of Electrical Engineering, Computing and Mathematical Science (EECMS)
    URI
    http://hdl.handle.net/20.500.11937/71466
    Collection
    • Curtin Research Publications
    Abstract

    The grazing incidence diffraction (GID) method in side inclination mode, described by Ma et al. in 2002, of polycrystalline thin-film residual stress was revisited and explained using simple geometric relations. To overcome the issue of decreasing peak intensity of this method, which is induced by the decreasing incident angle because of the Eulerian cradle Chi-tilt, an improvement of Omega (ω)–Phi (φ) compensation was devised and applied to a NiFe thin-film sample. The geometry of this improved ω–φ compensated GID method in side inclination mode is detailed in this paper. This improvement guarantees a constant incident angle on the sample surface and a fixed sample illumination volume during measurement. The measured data were analysed using parametric refinement in DIFFRAC.TOPAS v6 software in Launch Mode, and details of the input file (.INP) are explained in this paper. The tensile stress of the NiFe thin-film sample was measured to be 1181 ± 85 MPa using this improved method.

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