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Synthesis and characterisation of chemical bath deposited TiO2 thin-films

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Authors
Manurung, P.
Putri, Y.
Simanjuntak, W.
Low, It Meng
Date
2013
Type
Journal Article

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Manurung, P. and Putri, Y. and Simanjuntak, W. and Low, I.M. 2013. Synthesis and characterisation of chemical bath deposited TiO2 thin-films. Ceramics International. 39: pp. 255-259.
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Ceramics International
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NOTICE: This is the author’s version of a work that was accepted for publication in Ceramics International. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Ceramics International, Vol. 39, Issue 1. (2013). doi: 10.1016/j.ceramint.2012.06.019

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Abstract

A series of titania thin films was prepared by chemical bath deposition (CBD) of TiCl3 on indium tin oxside (ITO) glass at room temperature, followed by calcinations at 500°C for 4h. The effect of cyclic deposition on phase composition, microstructure and electrical resistivity of TiO2 thin films was characterised using X-ray diffraction, scanning electron microscopy and four-point probe respectively. Results showed that TiO2 films produced by single deposition cycle were amorphous. In contrast, those produced by 5 and 6 deposition cycles were partly amorphous and partly crystalline with the formation of rutile. Both the film thickness and electrical resistivity increased with an increase in the number of deposition cycles.